Xslicer SMX-6010

Microfocus X-Ray Inspection System

 

Xslicer SMX-6010是一款坚直照射型x射线检查设备,配备了岛津生产的微焦点x射线发生器和高分辦率平板探测器。通过高清晰度和宽动态范围图像,可以观察到细微的内部结构和缺陷。此外,可以简单快速地进行透视/CT模式切换,根据工作要求实施多种观察。Xslicer SMX-6010所覆盖的检查从体积不断缩小的电子元件到密度日益提高的多层实装基板。

 

倾斜CT拍摄的原理与特点

 

 可高倍放大拍摄板状样品

 

■ 倾斜CT 

倾斜CT拍摄大型实装板等时

因样品在XY载物台上,所以可移近X射线发生装置,进行高倍放大拍摄。

 

■ 直线CT 

直线CT拍摄大型基板等时

如果为获得高放大倍率而将样品靠近X射线发生装置侧,CT拍摄中样品会与X射线互相干扰,从而无法进行高倍放大摄影。

 
 

 观察事例

如果是基板上的样品,则不同于受样品宽度影响的直线CT,倾斜CT可进行高放大倍率摄影。

系统构成

 方便维护的本公司自制X射线发生装置与搭载各种安全机构的系统,
 实现更低成本、更安全的使用

X射线发生装置
搭载了管电压160kV·1μm分辨率 开放管X射线发生装置。实现高压发生器的一体化,无需进行高压电缆维护。自动调整功能,使更换灯丝更加简便。
※1μm分辨率:JIMA Chart测试

X射线检出器
搭载300万像素平板检出器。


5轴载物台
除搭载样品的载物台的XYZ轴外,检出器也会倾斜、旋转。5轴联动,支持所有角度的检查。

 

X射线防护箱
屏蔽向设备外部泄漏的X射线(泄漏到外部的射线低于1μSv/h)。具有正面门扉锁定机构, X射线照射时,正面门扉无法打开。同时,具有联锁机构,门扉打开的状态下,5轴载物台不移动。

 

碰撞检测传感器
X射线检出器的周围装有碰撞检测传感器,紧急时(样品碰撞时),驱动系统停止工作。

 

配套
仅在AC200 V±10 % 1.5 kVA(接地电阻100Ω以下)的条件下可动作。无需供应空气、冷却水等。

特点

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{"title":"\u4e0b\u8f7d","description":"Download the latest brochure.","source":"product","key":4633,"max":30,"filter_types":["brochures"],"link_title":"View other Downloads","link_url":"","pdf_links":[]} {"title":"\u5e94\u7528","source":"product","key":4633,"max":3,"filter_types":["applications","application_note","posters"],"link_title":"\u66f4\u591a","link_url":"\/an\/products\/non-destructive-testing\/microfocus-x-ray-inspection-system\/xslicer-smx-6010\/applications.html","config_list":[],"page_links":[{"type":"page","link_title":"","link_url":"\/an\/products\/non-destructive-testing\/microfocus-x-ray-inspection-system\/xslicer-smx-6010\/applications.html#anchor_0","time":""}],"column_title":"Documents"} {"title":"Technical Documents","source":"product","key":4633,"max":3,"filter_types":["technical","technical_reports","white_papers","primers"],"link_title":"\u66f4\u591a","link_url":"\/an\/products\/non-destructive-testing\/microfocus-x-ray-inspection-system\/xslicer-smx-6010\/applications.html#tbaleAnchor_technical","config_list":[],"page_links":[],"column_title":"Documents"} {"title":"Manuals","source":"product","key":4633,"max":3,"filter_types":["manuals"],"link_title":"\u66f4\u591a","link_url":"\/an\/products\/non-destructive-testing\/microfocus-x-ray-inspection-system\/xslicer-smx-6010\/applications.html#tbaleAnchor_manual","config_list":[],"page_links":[],"column_title":"Documents"} {"key":4633,"max":3,"link_title":"\u66f4\u591a","link_url":"\/an\/products\/non-destructive-testing\/microfocus-x-ray-inspection-system\/xslicer-smx-6010\/applications.html"}

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