EPMA-8050G

Electron Probe Microanalyzer

“The Grand EPMA” 诞生

搭载高质量场发射电子光学系统
将岛津EPMA分析性能发挥到极致

从SEM观察条件到1μA量级,在各种束流条件下都拥有优越空间分辨率的尖端场发射电子光学系统。结合岛津传统的高性能X射线谱仪,将分析性能发挥至极致。

当之无愧的“The Grand EPMA” ,高水准的EPMA诞生!

更高灵敏度面分析

使用1μA束流对不锈钢进行5000倍的面分析。精细地捕捉到了Cr含量轻微不同形成的不同的相(左侧),同时也成功地将含量不足0.1%的Mn分布呈现在我们眼前(右侧)。

实现微区更高灵敏度分析的先进技术

1 高亮度肖特基发射体
场发射电子枪采用的肖特基发射体比一般传统SEM使用的发射体针尖直径更大,输出更高。即可以保持其高亮度,还可提供高灵敏度分析不可缺少的稳定大电流。

2  EPMA专用电子光学系统
电子光学系统,聚光透镜尽可能的接近电子枪一侧,交叉点不是靠聚光透镜形成,而是由安装在与物镜光阑相同位置上,具有独立构成与控制方式的可变光阑透镜来形成交叉点的。简单的透镜结构,既能获得大束流,同时全部电流条件下设定更合适的打开角度,将电子束压缩到更细。当然是不需要更换物镜光阑的。

3 更高真空排气系统
电子枪室、中间室、分析腔体之间分别安装有筛孔(orifice)间隔方式的2级差动排气系统。中间室与分析腔体间的气流孔做到最小,以控制流入中间室的气体,使电子枪室始终保持着超高真空,确保发射体稳定工作。

4 高灵敏度X射线谱仪
至多可同时搭载5通道兼顾高灵敏度与高分辨率的4英寸X射线谱仪。52.5°的X射线取出角在提高了X射线信号的空间分辨率的同时,又可减小样品对X射线的吸收,实现高灵敏度的分析。

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