分子泵复合轴承型

A long-life bearing mechanism reduces maintenance costs.

  • Combination of magnetic and ceramic bearings
  • A proprietary damping mechanism is used to achieve low vibration and a bearing cooling function, additionally provides high reliability and long service life.

The pump can be used in combination with a small backing pump.

  • The combination of turbine blades and molecular drag pump achieves ultra high vacuum even with high backing pressure levels.
  • If used in combination with a small dry vacuum pump, such as a diaphragm pump, it can achieve ultra-high vacuum pressures.

The pump can be mounted in any orientation.

  • The pump unit can be mounted in vertical, horizontal, or inverted orientation.

Combination Bearings Line-up